Dynamic Simulation of Optical MEM Switches

نویسندگان

  • Timothy P. Kurzweg
  • Jose A. Martinez
  • Steven P. Levitan
  • Philippe J. Marchand
  • Donald M. Chiarulli
چکیده

Micro-optical-electrical-mechanical systems (MOEMS) present a new set of challenges for mixed technology systems on a chip (SoC) designers including the need for mixed-signal multi-domain simulation. We present new modeling techniques for optical and mechanical MEM components and apply these models for improved system-level simulation accuracy of MOEMS switches.

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تاریخ انتشار 2000